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Updated: Oct 1, 2025

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
Po-Chih Chen1, Wen-Chien Miao2,3, Tanveer Ahmed1
1Institute of Electronics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.
High costs and low yields in silicon carbide (SiC) device manufacturing stem from killer defects. This review explores SiC defect inspection technologies and solutions for mass production of high-quality SiC devices.
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