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Updated: Aug 19, 2025

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx
Published on: May 13, 2020
Synergistic Approach of Interfacial Layer Engineering and READ-Voltage Optimization in HfO2-Based FeFETs for
Yannick Raffel1, Sourav De1, Maximilian Lederer1
1Fraunhofer-Institut für Photonische Mikrosysteme IPMS - Center Nanoelectronic Technologies, Dresden01109, Germany.
Hafnium oxide ferroelectric field-effect transistors (FeFETs) show improved performance with interfacial layer engineering. SiON-based FeFETs achieve 96% accuracy in MNIST handwritten digit recognition for inference tasks.
Area of Science:
- Materials Science
- Electrical Engineering
- Computer Science
Background:
- Ferroelectric field-effect transistors (FeFETs) are promising for neuromorphic computing.
- Hafnium oxide (HfO2)-based FeFETs offer potential for high-performance synaptic devices.
- Interfacial layer (IL) engineering is crucial for optimizing FeFET characteristics.
Purpose of the Study:
- To enhance the performance of HfO2-based FeFETs through interfacial layer engineering and READ-voltage optimization.
- To evaluate the suitability of FeFETs with different interfacial layers (SiO2 and SiON) as synaptic devices for neuromorphic applications.
- To assess the impact of device degradation on neural network performance for inference-only operations.
Main Methods:
- Fabrication and characterization of FeFET devices with SiO2 and SiON interfacial layers.
- Neuromorphic simulations to evaluate FeFETs as synaptic devices.
- System-level simulations to analyze degradation effects (retention and noise) on neural network accuracy.
Main Results:
- FeFETs with SiO2 IL showed better low-frequency characteristics, while SiON IL exhibited superior WRITE endurance and retention.
- Device WRITE endurance was insufficient for online neural network training, necessitating an inference-only approach.
- System-level simulations indicated retention degradation significantly impacts inference-only operations more than low-frequency noise.
- A neural network utilizing SiON IL-based FeFETs achieved 96% accuracy on the MNIST dataset for inference, with a minor 2.5% deviation from the software baseline.
Conclusions:
- Synergistic engineering of interfacial layers and READ-voltage optimization can improve FeFET performance.
- SiON-based FeFETs are suitable for inference-only neuromorphic applications despite retention degradation challenges.
- Offline training followed by inference-only operation is a viable strategy for FeFET-based neuromorphic systems.
- Further improvements in WRITE endurance and retention are necessary for more demanding neuromorphic tasks.
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