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Correlative Microscopy for 3D Structural Analysis of Dynamic Interactions

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Introducing a Dynamic Reconstruction Methodology for Multilayered Structures in Atom Probe Tomography.

Constantinos Hatzoglou^1,2, Gérald Da Costa¹, Peter Wells³

¹INSA Rouen Normandie, CNRS, Groupe de Physique des Matériaux UMR 6634, Univ Rouen Normandie, INSA Rouen Normandie, CNRS, Groupe de Physique des Matériaux UMR 6634, Rouen F-76000, France.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada

|September 25, 2023

Summary

This summary is machine-generated.

This study introduces a new, simple method to improve 3D reconstructions from atom probe tomography (APT) data, enhancing depth accuracy for multilayered materials. The technique offers easier and more precise nanoanalysis for materials science applications.

Keywords:

atom probe tomography dynamic reconstruction field evaporation simulation multilayered structure

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Area of Science:

Materials Science
Nanotechnology
Analytical Chemistry

Background:

Atom probe tomography (APT) is a crucial 3D nanoanalysis technique in materials science.
Existing spatial reconstruction methods for APT data, established in 1995, have seen limited advancements.
Accurate reconstruction of multilayered structures remains a challenge.

Purpose of the Study:

To develop a simple, semianalytical approach for reconstructing multilayered structures in APT data.
To improve the depth accuracy and overall quality of APT reconstructions.
To provide an easily usable method that enhances the analysis of complex material interfaces.

Main Methods:

A field evaporation model was used to estimate the dynamic evolution of reconstruction parameters.
A semianalytical approach was developed to dynamically accommodate parameter variations during reconstruction.
The method was applied to reconstruct various multilayered structures experimentally.

Main Results:

The proposed method significantly improves the depth accuracy of reconstructed APT images.
Experimental reconstructions demonstrate enhanced fidelity for multilayered materials.
The technique dynamically adjusts reconstruction parameters for improved accuracy.

Conclusions:

The new semianalytical method offers a substantial improvement for atom probe tomographic reconstructions of multilayered structures.
Its ease of use and improved accuracy make it a valuable tool for materials characterization.
This advancement addresses limitations in APT data processing, particularly for layered materials.