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Ultrafast Laser 3D Nanolithography of Fiber-Integrated Silica Microdevices
Dezhi Zhu1,2,3, Shangben Jiang1,3, Changrui Liao1,3
1Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China.
Researchers developed a 3D nanolithography method for creating silica micro/nanostructures on fiber tips. This technique enables the fabrication of high-quality, integrated inorganic silica devices for advanced microsystems.
Area of Science:
- Materials Science
- Nanotechnology
- Optical Engineering
Background:
- Fiber-integrated micro/nanostructures are vital for industry due to their size, sensitivity, and EMI resistance.
- Manufacturing 3D fiber-tip structures using inorganic materials like silica presents significant challenges.
- Developing methods for silica nanostructure fabrication on fiber tips is crucial for microsystem advancement.
Purpose of the Study:
- To develop a 3D nanolithography strategy for fabricating fiber-integrated inorganic silica micro/nanostructures.
- To enable the creation of functional silica structures directly on optical fiber tips.
- To overcome limitations in fabricating non-polymeric fiber-tip structures.
Main Methods:
- Utilized ultrafast laser-induced multiphoton absorption for 3D nanolithography of hybrid organic-inorganic precursors.
- Employed acrylate-functionalized precursors without silica nanoparticles or polymer additives.
- Applied low-temperature annealing to convert printed structures into high-quality silica.
Main Results:
- Achieved sub-100 nm resolution in fabricated silica micro/nanostructures.
- Successfully integrated silica microcantilever probes and microtoroid resonators onto optical fibers.
- Demonstrated strong thermal stability and high quality factors for the fabricated silica devices.
Conclusions:
- The developed 3D nanolithography strategy offers a promising route for fabricating desired fiber-tip silica micro/nanostructures.
- This technique facilitates the creation of robust, high-performance inorganic silica devices integrated with optical fibers.
- The findings support the advancement of integrated functional devices for various microsystem applications.
