Smart resonant micro-sensor and micro-actuator: high-performance, wide range bi-axial magnetic sensitive/ insensitive...

Area of Science:

• Microelectromechanical Systems (MEMS)
• Advanced Sensor Technology
• Actuator Systems

Background:

• Growing demand for miniaturized smart sensors and actuators in intelligent systems.
• Need for hybrid devices with dual sensing and actuation capabilities.
• Limitations of current microdevices in complex magnetic environments.

Purpose of the Study:

• To present a proof-of-concept for a bi-directional Lorentz force magnetometer and actuator on a single MEMS chip.
• To demonstrate the device's hybrid functionality, tunable sensitivity, and magnetic field insensitivity.
• To explore its potential for advanced applications in intelligent and autonomous systems.

Main Methods:

• Design and fabrication of a MEMS device featuring a clamped-guided curved microresonator and micro-actuators.
• Utilizing electrothermal excitation for smart thermal actuation and dynamic sensing.
• Tuning the device's first symmetric mode via input power for frequency shift control.

Main Results:

• The device operates as a high-performance biaxial magnetic sensor (sensitivity ~36.58% T⁻¹, Bmin 0.83 µT Hz⁻¹) with linearity up to ±400 mT.
• It functions as a magnetic-field-insensitive actuator (sensitivity 3.28% T⁻¹) with ~4 µm displacement at 43 mW.
• Demonstrated tunable sensitivity and frequency shift based on input power levels.

Conclusions:

• The proposed MEMS microdevice exhibits promising hybrid functionality as both a sensor and actuator.
• Its tunable characteristics, magnetic field insensitivity, and ease of fabrication offer significant advantages.
• Potential for development of three-axis magnetic sensor/actuator networks and diverse industrial applications.