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Microscopic TV shearography for characterization of microsystems.
U Paul Kumar1, M P Kothiyal, N Krishna Mohan
1Department of Physics, Applied Optics Laboratory, Indian Institute of Technology Madras, Chennai TN 600 036, India. nkmohan@iitm.ac.in
This study presents a microscopic shearography technique for characterizing microsystems, enabling measurement of deformation slopes even under significant stress. The method successfully analyzed a microelectromechanical system pressure sensor.
Area of Science:
- Optics and Photonics
- Micro-engineering
- Materials Science
Background:
- Characterizing microsystems requires precise measurement of deformation.
- Traditional methods may struggle with large out-of-plane deformations at the microscale.
Purpose of the Study:
- To develop and demonstrate a microscopic TV shearographic configuration.
- To enable characterization of microsystems by measuring slopes under large out-of-plane deformation.
Main Methods:
- Utilized a long working distance zoom imaging system.
- Integrated a conventional Michelson shear interferometer.
- Employed microscopic TV shearography for slope measurement.
Main Results:
- Successfully characterized a microelectromechanical system (MEMS) pressure sensor.
- Measured slope under external pressure load.
- Demonstrated capability for large out-of-plane deformation analysis.
Conclusions:
- The developed microscopic shearographic configuration is effective for microsystem characterization.
- The technique is suitable for analyzing MEMS devices under load.
- This method provides valuable insights into micro-scale deformation behavior.
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