Modern Focused-Ion-Beam-Based Site-Specific Specimen Preparation for Atom Probe Tomography

Area of Science:

• Materials Science
• Nanotechnology
• Analytical Chemistry

Background:

• Focused ion beam (FIB) instruments have been used for atom probe tomography (APT) specimen preparation for approximately 30 years.
• Recent advancements in FIB methodologies have significantly improved APT applications.
• Hundreds of researchers worldwide now utilize FIB for APT specimen preparation.

Purpose of the Study:

• To review the historical origin and standard methods of FIB specimen preparation for APT.
• To detail key steps for correlative analysis using FIB-APT with techniques like transmission electron microscopy (TEM) and electron-beam backscatter diffraction (EBSD).
• To discuss strategies for preparing specimens from modern microelectronic devices and complex topologies.

Main Methods:

• Review of established FIB techniques, including lift-out and annular milling for APT specimen preparation.
• Presentation of methodologies for integrating FIB-APT with other microscopy techniques for correlative analysis.
• Discussion of specimen preparation strategies tailored for microelectronic devices, nanowires, nanoparticles, and organic materials.

Main Results:

• Standardized FIB methods, such as annular milling, are effective for preparing APT specimens.
• Correlative analysis with TEM and EBSD is achievable through specific FIB preparation steps.
• Successful strategies exist for preparing diverse and complex material structures for APT.

Conclusions:

• FIB-based specimen preparation is a mature and widely adopted technique for APT.
• Correlative analysis combining FIB-APT with other techniques enhances material characterization.
• Challenges in preparing complex nanostructures like nanowires and nanoparticles for APT persist but are being addressed.