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MEMS 3D Scan Mirror with SU-8 Membrane and Flexures for High NA Microscopy

Tianbo Liu1,2,3,4, Aaron J Svidunovich1,2,3,4, Benjamin C Wollant1,2,3,4

  • 1Department of Electrical and Computer Engineering, Montana State University, Bozeman, MT 59717 USA (tianbo.liu@msu.montana.edu).

Journal of Microelectromechanical Systems : a Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems
|August 28, 2019
PubMed

Keywords:
MEMS 3-dimensional scannerSU-8biaxial gimbalcancer detectionlaser microscopyvarifocal mirror

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